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MarSurf WM 100

3D Surface Measurement

DESCRIPTION

High-precision white light interfero-
metry.The MarSurf WM 100 with
new camera and functionally
en larged Interferometer Software
offers sub-nanometer resolution
and precision.
Key benefits:
• Maximum precision with sub-
nanometer resolution and
measuring accuracy
• Fast and simple
measurements- reliable results
• Suitable for all optical and
reflective surfaces, fine technical
surfaces and surfaces of circuit
boards, semi-conductor products
and biological tissue
• Three different measuring
modes: VSI, EPSI and PSI TECHNICAL DATA
• Special evaluation mode for
small steps WM 100
• 2D surface analysis and Measuring principle By interferometer, by white light interferometer
measurement evaluations Light source (WLI): LED, 505 nm
• Topographical 3D surface Measuring range Sensor unit can be moved manually over 200 mm in Z
analysis and measurement Object table can be moved manually in X and Y
evaluations
• Manual table and object Interferometer, white light interferometer:
posi tioning in up to 4 axes Measuring range (WLI): Up to 100 µm (vertical). More on request.
• Wide choice of lenses for perfect
adjustment to the measuring APPLICATIONS ACCESSORIES
object
• Sturdy design with granite Mechanical Engineering Optional:
base plate • To qualify and quantify roughness of metal surfaces • CT 120 two-axis tilting table
(ground, rolled, etc.) • Tilting table for large angles +/– 30°
Supplied with: • Set of standards
• Sensor system consisting of: Electronics and semiconductors • WLI Objective lenses: 2.5x0.075; 5x0.13; 10x0.3;
- WLI sensor head • Surface analysis of coatings, measurement and 20x0.4; 50x0.55; 100x0.7
- Camera, 1280 x 1024 pixels, analysis of electronic and semi-conductor components • MarSurf MfM for professional evaluation, graphical
up to 169 fps representation and creation of measuring records
- 100 µm piezo drive z-mea- Medical Technology (choice of Standard, Extended or Premium Version)
suring head • Metal, ceramic and plastic surfaces of implants, • Active vibration isolation system (for optimum damp-
• WLI software module, operating prostheses and Instruments ing for measurements in the nanometer and
Software sub-nanometer range)
• PC with Windows 10 Optics
and 24” screen • Roughness analysis of optical components
• Granite base and column with (all materials)
manual positioning of sensor
system
• Manual XY object table for
object positioning
• 20x0.4 DI lens (white light
Interferometer)

For more information, please visit our website: www.mahr.com

552 MarSurf | Surface Measuring Instruments