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MarSurf CWM 100

3D Surface Measurement

DESCRIPTION

The multi-measurement solution
MarSurf CWM 100 is a precise
optical measuring instrument with
sub-nanometer resolution combin-
ing a confocal microscope with a
white light Interferometer.
Key benefits:
• Highest precision with sub-
nanometer resolution
• Universal suitability for technical,
optical and reflective surfaces.
Also for surfaces of printed
circuit boards and semiconductor
products as well as biological
tissues
• 2D surface analysis and
measuring evaluations
• Topographic 3D surface analysis
and measuring evaluations TECHNICAL DATA
• Intelligent measuring strategies
- fast measurements – CWM 100
short measuring times Measuring principle By interferometer, by white light interferometer and confocal
• Microscope image field sizes, Light source (CM and WLI): LED, 505 nm
easily expandable by fully Measuring range Sensor unit can be moved 100 mm in Z, CNC controlled
automatic stitching Object table can be moved 100 mm in X and Y, CNC controlled
• Automatic table or object
positioning: 100 mm x 100 mm, Interferometer, white light interferometer:
longer distances on request Measuring range (WLI): More as 4 mm (Standard mode), more as 20 mm in ex-
• A wide range of lenses allows for tended mode
an ideal adaptation to the Confocal microscope:
measurement object Measuring range (CM): more than 12 mm (depending on resolution in Z and lens)
• Solid construction with granite
base plate and granite column
for the best possible vibration APPLICATIONS ACCESSORIES
damping
Mechanical Engineering Optional:
Supplied with: • To qualify and quantify roughness, geometry • CT 120 two-axes tilting table
• Sensor system consists of: and wear volume • Tilting table for large angles +/– 30°
- Confocal microscope & WLI • Set of standards
with 6x nosepiece Electronics and semiconductors • WLI Objective lenses: 2.5x0.075; 5x0.13; 10x0.3;
- Camera, 780 x 580 pixels, up • Component inspection down to the 20x0.4; 50x0.55; 100x0.7
to 48 images/s (standard sub-micrometer range for defect-free products • Confocal microscope objective lenses: 10x0.3; 10x0.5;
version) 20x0.4; 20x0.75;50x0.6; 50x0.8; 100x0.9
- 100 mm CNC controlled Z axis Medical Technology • MarSurf MfM for professional evaluation, graphical
with integrated Heidenhain • Quality assurance of medical surfaces in representation and creation of measuring records
glass scale production and laboratory (choice of Standard, Extended or Premium Version)
• One operating software with • Active vibration isolation system (for optimum damp-
WLI and confocal software Material Science ing for measurements in the nanometer and sub-
modules • Optimization of functional properties of nanometer range
• Granite base frame and column new surfaces and products
with sensor system and CNC
controlled object table Microsystems Technology
• CNC controled motorized Z axis • Measure complex surface geometries of smallest
and XY table for probe position- components with nanometer precision
ing and image field merging
• Lenses (optional)
- 4x to 150x (confocal
microscope)
- 2.5x to 100x (white light
Interferometer)

For more information, please visit our website: www.mahr.com

MarSurf | Surface Measuring Instruments 553